Positioning control method
US6975086B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2000 |
| Grant date | Dec 13, 2005 |
| Priority date | — |
| Expiry date | Mar 2, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49176
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A pre-compensator is provided based on a definition of abase vibration model having a motor transfer function 1 for generating motor displacement 12 from an input that is the sum of input torque and a table propelling force 10 multiplied with a reducer and Cartesian-to-polar coordinate transformation constant 14, a table transfer function 14 for multiplying a deviation 11 between an output that is the motor displacement multiplied with a reducer and polar-to-Cartesian coordinate transformation constant 2 and table displacement with a table-displacement-to-force conversion spring constant 3 to generate the table propelling force 10 and to output table displacement 7, and a base driving transfer function 5 for generating base displacement by multiplying base displacement 9 with a base-displacement-to-force conversion spring coefficient 6 and inputting the same with the table propelling force, table displacement 8 being generated from a difference between the table displacement and the base displacement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.