Resonance scanner

US6975442B2 · kind B2 · utility

Assignee

• JENOPTIK LDT GmbH · DE

Inventors

• Thomas Gessner · Plymouth, US
• Wolfram Doetzel · Chemnitz, DE
• Christian Kaufmann · Sindelfingen, DE
• Jan Mehner · Neukirchen, DE
• Ramon Hahn · Chemnitz, DE
• Steffen Kurt · Bitterfeld-Wolfen, DE

Key dates

• Filing date: Apr 12, 2002
• Grant date: Dec 13, 2005
• Expiry date: Sep 5, 2022

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/047
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A resonance scanner, wherein a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1), said drive plate (4) being attached within the frame (3) by two first torsion springs (6) such that the drive plate (4) can oscillate about a common first axis of torsion (8) of both torsion springs (6), said mirror (5) being attached within the drive plate (4) by two second torsion springs (7) such that the mirror (5) can oscillate about a common second axis of torsion (9) of both torsion springs (7), and said first axis of torsion (8) and said second axis of torsion (9) being parallel to each other; wherein, further, only the frame (3) of the actuator part (1) is attached to side walls (10) of a box-shaped stator part (2), a drive means (stator electrodes 15 or coil 24) is arranged at a bottom (11) of the stator part (2) only in the region of the geometrical surface area of the drive plate (4) and said bottom (11) has a recess (13) in the region of the geometrical surface area of the mirror (5), which recess (13) is dimensioned at least such that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11), said drive means (stator…