Multilayer electrically conductive anti-reflective coating
US6975453B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1998 |
| Grant date | Dec 13, 2005 |
| Priority date | — |
| Expiry date | Oct 27, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S428/913
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention comprises a multilayer inorganic anti-reflective coating with predetermined optical properties, for application on a flexible substrate. The coating comprises a stack consisting of five material layers, whereby the third layer is a dummy layer consisting of an electrically conductive material, preferably indium-tinoxyde, which provides the coating with an adjustable electrical sheet resistance of between 25 and 2000 Ω/sq without thereby influencing its optical properties. The anti-reflective coating can be applied onto a flexible substrate (e.g. a polymer film) by means of a single 12 or double pass vacuum magnetron sputtering operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.