Electronic device and method of applying voltage to capacitor
US6975501B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2004 |
| Grant date | Dec 13, 2005 |
| Priority date | — |
| Expiry date | Dec 16, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15312
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic device comprises a silicon substrate (base material), an underlying insulating film formed on the silicon substrate, a capacitor constructed by forming a bottom electrode, a capacitor dielectric film, and a top electrode sequentially on the underlying insulating film, and a voltage supply circuit for supplying a voltage with a bipolar waveform to at least one of the bottom electrode and the top electrode, wherein an amplitude of the voltage is set to 5×105 d (V) or less (d: an interval (cm) between the top electrode and the bottom electrode). Accordingly, an electronic device and a method of applying a voltage to a capacitor, capable of prolonging a lifetime of a capacitor by preventing degradation of a capacitor dielectric film are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.