Non-linear method for micro-mirror control
US6975787B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2002 |
| Grant date | Dec 13, 2005 |
| Priority date | — |
| Expiry date | May 5, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Described is a method for controlling the angular position of a mirror. The method includes sensing the angular position of the mirror, generating a first linear control signal in response to the angular position and generating a first non-linear control signal to position the mirror. The method can also include generating a second linear control signal in response to the angular position and generating a second non-linear control signal to position the mirror. Generation of the linear control signal is based on conventional linear systems techniques. The method can be applied to mirror arrays in which the generation of the non-linear control signal is adapted for mirror performance variations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.