Patent · US Expired

Method and apparatus facilitating mechanical beam steering for optical integrated circuits

US6975793B2 · kind B2 · utility

6Cited by
20References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 2002
Grant dateDec 13, 2005
Priority date—
Expiry dateNov 7, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/12
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Actuators facilitating mechanical beam steering for optical integrated circuits are disclosed. The mechanical beam steering can mitigate thermal sensitivity of optical circuits, for example, arrayed waveguides. Also disclosed are methods for fabricating optical integrated circuits employing actuators.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.