Optical device for measuring pressure or force

US6976395B2 · kind B2 · utility

Assignee

• ADZ Nagano GmbH · DE

Inventors

• Dietmar Arndt · Wittenberge, DE
• Reinhard Hegewald · Dresden, DE
• Thomas Hellfeld · Rabenau, DE
• Lutz Schmidt · Dresden, DE
• Bernhard Steiger · Frankenberg, Hesse, DE

Key dates

• Filing date: Aug 2, 2002
• Grant date: Dec 20, 2005
• Expiry date: Aug 27, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L11/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to optical devices for measuring pressure or force, comprising an electromagnetic radiation source, and a pressure membrane or a spiral spring which has a surface that at least partially reflects the electromagnetic rays of the electromagnetic radiation source. The inventive devices are especially characterized in that they allow, inter alia, measurement of even the slightest pressure changes of fluids and other flowable materials in the stationary and/or flowing state or even the slightest mechanical deformations on spiral springs. In order to do this, the rays of an electromagnetic radiation source are incident on the at least partially reflective surface of the pressure membrane or spiral spring. At least one section of a stationarily located body or of a stationarily located body having a reflective layer is disposed in the path of the reflected rays, upstream of a photodetector for said rays, and projects into said rays. A mechanical modification causes the reflected rays to be absorbed, diffracted, reflected again and/or split to a higher or lesser extent by the body.