Direct writing of optical devices in silica-based glass using femtosecond pulse lasers

US6977137B2 · kind B2 · utility

Assignee

• CORNING INCORPORATED · US

Inventors

• Nicholas Francis Borrelli · Elmira, US
• Joseph Francis Schroeder, III · Corning, US
• Charlene Marie Smith · Corning, US
• Alexander Mikhailovich Streltsov · Corning, US

Key dates

• Filing date: Sep 17, 2001
• Grant date: Dec 20, 2005
• Expiry date: Jun 11, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S430/146
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to methods of writing a light-guiding structure in a bulk glass substrate. The bulk glass substrate is preferably made from a soft silica-based material having an annealing point less than about 1380° K. A pulsed laser beam is focused within the substrate while the focus is translated relative to the substrate along a scan path at a scan speed effective to induce an increase in the refractive index of the material along the scan path. Substantially no laser-induced physical damage of the material is incurred along the scan path. Various optical devices can be made using this method.