Thin-film piezoelectric resonator and method for fabricating the same
US6977563B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2003 |
| Grant date | Dec 20, 2005 |
| Priority date | — |
| Expiry date | Nov 19, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0428
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A thin-film piezoelectric resonator including a piezoelectric thin film having piezoelectric characteristic, and an upper electrode and a lower electrode arranged on opposite surfaces of the piezoelectric thin film for applying an excitation voltage to the piezoelectric thin film, wherein: each of the upper electrode and the lower electrode includes a resonant portion, and a lead-out portion; and the electrode thickness of at least one part of the lead-out portion in at least one of the upper electrode and the lower electrode is larger than the electrode thickness of the resonant portion formed to be continued from the lead-out portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.