Pressure sensor

US6978678B2 · kind B2 · utility

Assignee

• Wika Alexander Wiegand GmbH & Co. KG · DE

Inventors

• Franz-Josef Lohmeier · Miltenberg, DE
• Joachim Ballmann · Amorbach, DE
• Andreas Trützler · Miltenberg, DE
• Peter Furst · Burgstädt, DE
• Uwe Vonau · Schwabach, DE
• Jurgen Pleyer · Riedstadt, DE
• Niki Speier · Lauterecken, DE

Key dates

• Filing date: Jun 23, 2004
• Grant date: Dec 27, 2005
• Expiry date: Jul 23, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/148
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a pressure sensor comprising a sensor element (2) having a flat membrane (4) which is transformed at its edge into a hollow-cylindrical ring (6) so that a central recess (20) is provided at the lower side (10) of the membrane (4). On the upper side (8) of the membrane (4) a resistance arrangement consisting of electric resistors is disposed. A sleeve (54) projects into the recess (20) and supports a first elastomeric sealing ring (66) which is tightly arranged at the circumferential area of the recess (20). Furthermore the sleeve (54) supports a second elastomeric sealing ring (68) which serves for sealing at a feeding tube for pressure fluid formed in a component part to which the pressure sensor is mountable. The sleeve (54) is rigidly connected to a disk (56) which is attached with its outer edge (58) to a casing (26) enclosing the sensor element (2). Mechanical forces occurring during and after assembly of the pressure sensor to the component part are introduced into the casing (26) via the sleeve (54) and the disk (56) so that the sensor element (2) is kept free from mechanical distortions which might entail an undesired deformation of the membrane (4)…