Patent · US Expired

Laser system and method for material processing with ultra fast lasers

US6979798B2 · kind B2 · utility

29Cited by
19References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2004
Grant dateDec 27, 2005
Priority date
Expiry dateApr 30, 2024

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K2101/40
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

Laser system and method for material processing with ultra fast lasers are provided. One aspect of the invention features the method which removes at least a portion of a target structure such as a memory link while avoiding undesirable damage to adjacent non-target structures. The method includes applying a single ultra short laser pulse to the target structure to remove the target structure with the single pulse.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.