Variable capacitance
US6979852B2 · kind B2 · utility
0Cited by
1References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 23, 2003 |
| Grant date | Dec 27, 2005 |
| Priority date | — |
| Expiry date | Sep 23, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/125
Abstract
A variable capacitance formed in a semiconductor substrate with a ribbed surface, having a first electrode formed of all the ribs protruding from the substrate, of portions of the substrate underlying the ribs, and of at least portions of the substrate separating the bases of two ribs, having a second electrode superposed to at least one portion of the first electrode. The ribs are irregular in terms of cross-section and/or planar base surface area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.