Electronic device formed from a thin film with vertically oriented columns with an insulating filler material
US6979938B2 · kind B2 · utility
2Cited by
8References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 18, 2003 |
| Grant date | Dec 27, 2005 |
| Priority date | — |
| Expiry date | Nov 10, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
Abstract
A thin film device comprises: a substrate and a thin film having a thickness formed on the substrate, wherein the thickness of the thin film is at least 1 micrometer, a crystal structure having crystals with a grain size formed within the thin film, wherein the grain size of a majority of the crystals includes a height to width ratio greater than three to two.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.