Condensation particle counter
US6980284B2 · kind B2 · utility
17Cited by
9References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2001 |
| Grant date | Dec 27, 2005 |
| Priority date | — |
| Expiry date | Oct 19, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0681
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A condensation particle counter measures the number of ultra-fine particles by growing the ultra-fine particles through a condensing process. The counter includes a capillary in which vapor of operating liquid is condensed and the ultra-fine particles grow. An insulating material surrounds the capillary to shut out heat flow between the capillary and the environment. The condensation particle counter can use various operating liquids including alcohol and water, and can be also applied to semiconductor clean rooms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.