Methodology for a MEMS variable optical attenuator
US6980727B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2004 |
| Grant date | Dec 27, 2005 |
| Priority date | — |
| Expiry date | Dec 13, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/266
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An improved cantilever beam optical switch methodology which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.