Piezoelectric ink jet print head and fabrication method for a pressure chamber thereof
US6981300B2 · kind B2 · utility
0Cited by
4References
2Claims
0Family size
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Key dates
| Filing date | Sep 2, 2003 |
| Grant date | Jan 3, 2006 |
| Priority date | — |
| Expiry date | Mar 31, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric ink jet print head and a fabrication method for a pressure chamber thereof. A silicon substrate has at least one large-size opening. A photoresist layer is formed in the large-size opening of the silicon substrate and has a plurality of small-size trenches spaced apart from each other. Each of the small-size trenches serves as a pressure chamber. An adhesion layer is formed overlying the silicon substrate to cover the photoresist layer and the small-size trenches. A silicon layer is formed overlying the adhesion layer to serve as a vibrating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.