Patent · US Expired

Thermoelectric cooling for microelectronic packages and dice

US6981380B2 · kind B2 · utility

37Cited by
8References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 2002
Grant dateJan 3, 2006
Priority date
Expiry dateDec 30, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/01079
  • WIPO fieldThermal processes and apparatus
  • WIPO sectorMechanical engineering

Abstract

Apparatus and methods in accordance with the present invention utilize thermoelectric cooling (TEC) technology to provide enhanced power distribution and/or dissipation from a microelectronic die and/or microelectronic packages. Individual TEC devices are thermally interconnected with the microelectronic die in a number of placement configurations, including between the microelectronic die and the heat sink, on the integrated heat spreader (IHS) inner surface, and on the IHS outer surface. TEC devices comprise p- and n-type semiconducting material created using similar process as the microcircuits. The TEC devices are located in various regions within or on the microelectronic die, including directly below the microcircuits, on the backside of the microelectronic die, and on a separate substrate of microelectronic die material fabricated apart from the microelectronic die and subsequently thermally coupled to the backside of the microelectronic die.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.