Method and apparatus for measuring gas transmission rates of deformable or brittle materials
US6981403B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2003 |
| Grant date | Jan 3, 2006 |
| Priority date | — |
| Expiry date | Dec 19, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are an apparatus and a method for measuring gas transmission rates and nanoleaks of deformable and brittle materials. The apparatus includes a test chamber having an upper and lower diffusion cells that when closed form a chamber wall seal, a gas inlet and a gas outlet in fluid communication with the lower diffusion cell, the upper diffusion cell being fluidly connected to a high-vacuum mass spectrometer. The method of measuring gas transmission rates and nanoleaks includes placing a sealed package containing the test gas in the lower diffusion cell, closing the upper and lower diffusion cells, flushing the lower diffusion cell with a source of a second gas other than the test gas, closing off the source of the second gas; and measuring the leak rate of the sealed package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.