ALN material and electrostatic chuck incorporating same
US6982125B2 · kind B2 · utility
9Cited by
9References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2002 |
| Grant date | Jan 3, 2006 |
| Priority date | — |
| Expiry date | Feb 16, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ10V/ρ500V less than about 5. In this regard, ρ10V represents the resistivity of the electrostatic chuck at 10 applied volts while ρ500V represents the resistivity of the AlN material at 500 applied volts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.