Patent · US Expired

Transmission electron microscope sample preparation

US6982429B2 · kind B2 · utility

26Cited by
9References
9Claims
0Family size

Inventors

Key dates

Filing dateJul 6, 2004
Grant dateJan 3, 2006
Priority date—
Expiry dateJul 6, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/3174
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.