Monochromator system and applications thereof
US6982789B1 · kind B1 · utility
6Cited by
20References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 8, 2003 |
| Grant date | Jan 3, 2006 |
| Priority date | — |
| Expiry date | Jun 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monochromator system applicable in spectrophotometer, polarimeter and ellipsometer systems which operate over a large range of wavelengths, including a stage which enables position adjustment of the location of a source of electromagnetic radiation in lateral (X), longitudinal (Y) and vertical (Z) directions, from a common location outside an enclosure, and including multiple detector systems mounted in a manner which allows easily, sequentially, via mechanical motion, placing a first and then a second thereof so as to receive a beam of electromagnetic radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.