Semiconductor sensor and transmitter for use in tire condition monitoring apparatus
US6983650B2 · kind B2 · utility
1Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2003 |
| Grant date | Jan 10, 2006 |
| Priority date | — |
| Expiry date | Jan 8, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0092
- WIPO fieldTransport
- WIPO sectorMechanical engineering
Abstract
A compact and light semiconductor sensor for detecting pressure and acceleration. A pressure sensor is formed on a first surface of an intermediate plate. An acceleration sensor is formed on a second surface of the intermediate plate. A first plate having a diaphragm is bonded to the intermediate plate to define a hermetic chamber of the pressure sensor. A second plate is bonded to the second surface of the intermediate plate. A spring support supports the mass in a manner relatively movable with respect to the second plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.