Scanning SQUID microscope with improved spatial resolution
US6984977B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2001 |
| Grant date | Jan 10, 2006 |
| Priority date | — |
| Expiry date | Sep 14, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/54
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning SQUID microscope for acquiring spatially resolved images of physical properties of an object includes a SQUID sensor arranged in perpendicular to the plane of the object under investigation for detecting tangential component of the magnetic field generated by the object. During scanning of the SQUID sensor over the object under investigation, the position signal from a position interpreting unit, as well as relevant output signals from the SQUID sensor are processed by a processing unit which derives from the data, spatially resolved images of the physical properties of the object. The specific orientation of the SQUID sensor with respect to the plane of the object permits an enlarged area of the SQUID chip on which the modulation and feedback line can be fabricated in the same technological process with the SQUID sensor. Additionally, larger contact pads afforded provide for lower contact resistance and ease in forming contact with bias and read-out wires.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.