Reflection type liquid crystal display and method for manufacturing the same and mask for manufacturing reflection type liquid crystal display
US6985195B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2000 |
| Grant date | Jan 10, 2006 |
| Priority date | — |
| Expiry date | Feb 24, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133553
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A reflection type liquid crystal display is formed by an interlayer insulating film having appropriate unevenness of an inseparable pattern in a picture element region and having a contact hole of a separable pattern on a drain electrode of a TFT is formed by plainly applying a photosensitive insulating resin so that it may dissolve difference in level caused by a gate electrode wiring, source electrode wiring, and the TFT, and conducting exposure and development while changing exposure amount. The exposure of the insulating resin is conducted through divisional exposure in which the inseparable pattern and the separable pattern are arranged on different masks, and the inseparable pattern is exposed by a predetermined exposure amount of 20 to 80% of an exposure amount for the separable pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.