Method and apparatus for compact Fabry-Perot imaging spectrometer
US6985233B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2004 |
| Grant date | Jan 10, 2006 |
| Priority date | — |
| Expiry date | Jul 19, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1347
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for compact Fabry-Perot imaging spectrometer is presented. More specifically, in one embodiment, a tunable Fabry-Perot optical filter for providing a spatially accurate wavelength-resolved image of a sample having two spatial dimensions is presented. The optical filter may include plural filter elements having an initial predetermined spacing between adjacent filter elements; and a micro electro-mechanical system (“MEMS”) actuator. One of the plural filter elements may be attached to the MEMS actuator so that the actuator is capable of moving the one filter element relative to another of the plural filter elements to thereby tune the Fabry-Perot optical filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.