Patent · US Expired

Capped microsensor

US6986278B2 · kind B2 · utility

2Cited by

2References

6Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Frank Schatz · Kornwestheim, DE
Carsten Raudzis · Neuffen, DE
Mathias Reimann · Ditzingen, DE

Key dates

Filing date	May 3, 2004
Grant date	Jan 17, 2006
Priority date	—
Expiry date	May 3, 2024

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0264
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A capped microsensor is described. It is suggested that a current conductor, positioned in the cavity and having at least two voltage taps, be provided, this configuration being used for seal testing, e.g., during quality control, by detecting at least one thermodynamic variable of a gaseous medium present inside the cavity via this configuration.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.