High-flow microvalve
US6986365B2 · kind B2 · utility
26Cited by
10References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2003 |
| Grant date | Jan 17, 2006 |
| Priority date | — |
| Expiry date | Mar 18, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86734
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.