Electrostatic microvalve and a method for the operation thereof
US6986500B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2004 |
| Grant date | Jan 17, 2006 |
| Priority date | — |
| Expiry date | Feb 20, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87981
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electrostatic microvalve has a partition dividing a first and a second valve chamber from each other and having a through duct extending through it, such through duct opening at a first and a second opening into the first and the second valve chamber. In the first valve chamber there is a valve member for the control of first duct opening. In the second valve chamber there is a control member, using which the second duct opening may be at least partly closed in order to reduce the flow force acting on the valve member so that the valve member may be switched over with a smaller electrostatic force into a closed position closing the first duct opening
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.