Organozirconium composite and method of synthesizing the same, raw material solution containing the same, and method of forming lead zirconate titanate thin film
US6987197B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 6, 2003 |
| Grant date | Jan 17, 2006 |
| Priority date | — |
| Expiry date | Feb 12, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/003
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The organozirconium composite of the present invention has a decomposition temperature which is near the respective decomposition temperatures of an organolead compound and an organotitanium compound. The raw material solution can precisely control the composition of a PZT thin film over a broad temperature range. The raw material solution is less likely to react an organolead compound even when mixed with the organolead compound. The present invention provides a raw material solution which is less likely to cause vapor phase cracking. The organozirconium composite comprises one, or at least two kinds of zirconium chelate complexes containing, as a ligand, both of a first β diketone and a second β diketone having a structure different from that of the first β diketone, wherein, when at least two kinds of zirconium chelate complexes are contained, the coordination numbers of the first β diketone and the second β diketone that coordinate to at least two kinds of zirconium chelate complexes vary depending on the respective zirconium chelate complexes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.