Patent · US Expired

Vibration monitoring in optical and opto-electronic beam guiding systems

US6987626B2 · kind B2 · utility

1Cited by
8References
30Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 20, 2003
Grant dateJan 17, 2006
Priority date
Expiry dateJul 14, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/646
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical component mount with beam deviation monitoring and beam guiding system using such optical component mounts. The optical component mount has a location for mounting an optical element thereon for operating on the beam and at least one sensor attached to the optical mount at a predetermined position to at least one mode of the optical component mount. The predetermined position is selected depending on the state of the optical component mount. The state can be, e.g., a vibrational state or a thermal expansion state. The predetermined position is chosen near or at an anti-node of at least one mode contributing to the state. The state of the optical mount is determined based on the signals obtained from the at least one sensor, which can be an accelerometer in the case of monitoring a vibrational state or a temperature sensor in the case of monitoring a thermal expansion state.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.