Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
US6989117B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2004 |
| Grant date | Jan 24, 2006 |
| Priority date | — |
| Expiry date | Feb 23, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D18/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of making a polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The method comprising placing the fibers and the precursors in a cavity of a mold for shaping the polishing pad; applying a differential pressure across a mold cavity, where the differential pressure and the amount of precursors are sufficient to cause the precursors to fill the interstices substantially completely before completion of the reaction; and applying sufficient heat to the mold to at least partially cure the polishing pad by causing the precursors to react.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.