Inductor Q value improvement
US6989578B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2003 |
| Grant date | Jan 24, 2006 |
| Priority date | — |
| Expiry date | Aug 30, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/00
Abstract
An inductor in an integrated circuit comprises a conductive trace disposed over an insulating layer which overlies a semiconductor substrate of a first conductivity type and at least two deep wells of opposite conductivity type in the substrate underneath the track. In another embodiment, an inductor in an integrated circuit comprises a conductive trace disposed over an insulating layer which overlies a semiconductor substrate of a first conductivity type; a shallow trench isolation region formed in the substrate underneath the trace; and at least two deep wells of opposite conductivity type in the substrate underneath the shallow trench isolation region. The present invention also includes methods of manufacturing the aforementioned inductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.