Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
US6989921B2 · kind B2 · utility
48Cited by
11References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2001 |
| Grant date | Jan 24, 2006 |
| Priority date | — |
| Expiry date | Oct 16, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/035
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.