Patent · US Expired

Dual diaphragm valve

US6991213B2 · kind B2 · utility

5Cited by
9References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 9, 2004
Grant dateJan 31, 2006
Priority date
Expiry dateAug 9, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L9/0072
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A valve for regulating the flow of fluids (gas or liquid) using two flexible diaphragms in which an additional element is added to promote rolling contact between the diaphragms. The valve operates in a normally open configuration where fluid flows into the valve, passed through holes or openings in two electrostatically operative diaphragms and out of the valve. The holes or openings in one diaphragm are offset from the holes or openings in the other diaphragm, so that upon electro-static actuation, the diaphragms will seal together, closing the valve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.