Apparatus and method for image optimization of samples in a scanning electron microscope
US6992287B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 10, 2004 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Nov 10, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system and method for identifying an optimal landing energy of a probe current in a scanning electron microscope system. A probe current having a known landing energy is directed at a sample for producing a signal electron beam. The current of the signal electron beam is measured by directing the beam to a current detector for calculating a current yield, which is the ratio of the signal current to the probe current. The landing energy can then be changed for subsequent measurements of the signal current to identify the landing energy which produces a desired current yield. Once identified, the landing energy value can be used to produce a signal electron beam directed towards an imaging detector to generate topographic images of samples.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.