Temperature adjustment apparatus, exposure apparatus having the same, and device fabricating method
US6992306B2 · kind B2 · utility
11Cited by
9References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2004 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Apr 14, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B2321/0212
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.