Position sensor for a pivoting platform
US6992422B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2003 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Jun 22, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/185
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A position sensor for a pivoting platform which has a first portion that flexes when the platform pivots and a second portion of the platform that is rigid, utilizes a piezoresistive element on the first portion of the platform. A connecting terminal for the piezoresistive element is on the second portion and thus not subject to the flexing stresses. The platform can have two symmetrical arms as the flexing portion, and a pair of piezoresistive elements can be formed on each of the arms in order to double the output voltage changes with changes in these positions of the platform. A temperature compensating piezoresistive element can be formed on the rigid portion of the platform and connected to the piezoresistive element or elements. The piezoresistive elements can be formed directly on the portions of the platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.