Patent · US Expired

Method and apparatus for monitoring the purity and/or quality of steam

US6992494B2 · kind B2 · utility

12Cited by
32References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 18, 2004
Grant dateJan 31, 2006
Priority date
Expiry dateJun 18, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N25/60
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus for monitoring at least one of steam purity and steam quality for steam used in a decontamination process. A capacitor is exposed to the steam, wherein the steam acts as a dielectric between the plates of the capacitor. Permittivity of the dielectric is affected by the purity and/or quality of the steam, and thus a measurement of electrical properties of the capacitor is used to monitor steam purity and/or quality.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.