Efficient wave propagation for terahertz imaging and sensing
US6992824B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Dec 27, 2003 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Mar 2, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of wave propagation from 100–10000 GHz. The currently disclosed method and apparatus adapts micro-opto-electro-mechanical systems (MOEMS) technologies and processes to construct Kinoform optical components from microwave to terahertz range. The method uses induced coupled plasma (ICP) and gray scale processes for upper terahertz band; LIGA-based high aspect ratio (HAR) and gray scale processes are for the mid band; and computer numerical control (CNC) for lower band. In all cases, the thickness of any processed components is about the respective wavelength and system efficiency is about 95%. A Kinoform lens element is designed at 5000 GHz. However, the method is applicable for the entire terahertz band.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.