Waveguide/MEMS switch
US6993219B2 · kind B2 · utility
0Cited by
13References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2003 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Apr 30, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.