Manufacturing product carrier environment and event monitoring system
US6993405B2 · kind B2 · utility
16Cited by
11References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2003 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Nov 5, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus, method and system for monitoring the environment surrounding a product in a product carrier and events affecting the product carrier and product in the product carrier during manufacture of the product. The apparatus including: a product carrier adapted to transport product undergoing manufacture; and a first device adapted to sense an attribute of an environment within the product carrier or an event affecting the product carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.