Pressure sensor module having stress isolation platform
US6993975B2 · kind B2 · utility
4Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2003 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Dec 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor module is provided with an isolation platform which isolates stress. The pressure sensor module includes a base structure and a cantilever member formed in the base structure by an isolation gap. A pressure sensing element is located on the cantilever member such that the cantilever member provides stress isolation to the pressure sensing element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.