Pyrotechnic microactuators for microsystems
US6994030B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2002 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Apr 23, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H39/006
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The technical field of the invention is that of microactuators designed for mechanical, chemical, electrical or thermal functions in microsystems, for microelectronic applications such as chips, or biomedical applications such as cards incorporating microfluidics. The invention concerns a microactuator comprising a chamber machined in a solid support and containing a pyrotechnic charge. Said microactuator is essentially characterised in that the chamber is partly delimited by a deformable membrane, such that the gases emitted by combustion of the pyrotechnic charge enable to increase the volume of said chamber by deforming said membrane while maintaining intact the solid walls of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.