Micro-connector structure and fabricating method thereof
US6994578B1 · kind B1 · utility
8Cited by
1References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 28, 2004 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Aug 28, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S439/931
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
MICRO-CONNECTOR STRUCTURE AND method of making the same are disclosed. The micro-connector is microminiaturized and improved its degree of compaction by using semiconductor process. The process is etching silicon substrates into V-shaped channels and then a layer of nanometer structure is grown on them to increase stability of conductivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.