Method for forming nanoscale features

US6995336B2 · kind B2 · utility

Assignee

• THE REGENTS OF THE UNIVERSITY OF MICHIGAN · US

Inventors

• Alan Hunt · Plymouth, US
• Gerard Mourou · Rochester, US
• Ajit P. Joglekar · Ann Arbor, US
• Edgar Meyhofer · Ann Arbor, US
• John A. Nees · Ann Arbor, US
• Greg Spooner · Kensington, US

Key dates

• Filing date: Jan 26, 2004
• Grant date: Feb 7, 2006
• Expiry date: Mar 2, 2024

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K26/361
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.