MEMS differential actuated nano probe and method for fabrication
US6995368B2 · kind B2 · utility
8Cited by
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3Claims
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Key dates
| Filing date | Mar 9, 2004 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Mar 9, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.