Thin film transistor array inspection apparatus
US6995576B2 · kind B2 · utility
11Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 18, 2004 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Nov 18, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2594
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A TFT array inspection apparatus includes an electron beam source for irradiating an electron beam, a detecting device for detecting an electron beam emitted from a sample upon irradiating the electron beam to output a detected signal, and a sample potential changing device for changing a sample potential. A calibration device calibrates the detected signal using a calibration curve of the sample potential and the detected signal to obtain the sample potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.