Fluorine-containing resin material lowly permeable to liquid chemical
US6998454B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2003 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Jun 20, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/3154
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
To provide a suitable material having improved impermeability to liquid chemicals and cracking resistance while retaining excellent heat resistance and processability inherent in FEP-based fluororesins, a molded article of which is useful in the field of semiconductor production apparatus and the like. The present invention provides a fluorine-containing resin material comprising a fluorine-containing copolymer comprising 85 to 95.5% by mole of a repeating unit derived from tetrafluoroethylene, 5 to 10% by mole of a repeating unit derived from hexafluoropropylene and 0.1 to 5% by mole of a repeating unit derived from at least one higher perfluoro(vinyl ether) represented by the formula (1):CF2═CF—O—Rf1 (1)wherein Rf1 is a perfluoroalkyl group having 5 to 10 carbon atoms or a perfluoro(alkoxyalkyl) group having 4 to 17 carbon atoms, and molded article thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.