Integrated spectroscopic microbolometer with microfilter arrays
US6998613B2 · kind B2 · utility
3Cited by
4References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2003 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Jun 15, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for forming an integrated circuit includes providing an array of detectors proximate an outer surface of a first substrate layer. The array of detectors operate to detect the presence or absence of one or more wavelengths within a spectrum of transmitted energy. One or more filters are provided proximate a second substrate layer. The one or more filters operate to affect the spectrum of transmitted energy through the one or more filters. The second substrate layer is proximate to the outer surface of the first substrate layer to enclose the array of detectors in a vacuum environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.