Deformable MEMS mirror with membrane actuated by application of torque
US6998758B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2003 |
| Grant date | Feb 14, 2006 |
| Priority date | — |
| Expiry date | Nov 24, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.